SALSABIILA, Natasya; NAYAN, Nafarizal; AZMAN, Zulkifli; ABU BAKAR, Ahmad Shuhaimi; WAN SABLI, Sharaifah Kamariah; ADRIYANTO, Feri. Mini Review of RF Magnetron Sputtering for Aluminum Nitride Thin Film Deposition: Scale-Up Challenges and Perspectives. Emerging Advances in Integrated Technology, [S. l.], v. 6, n. 2, p. 11–26, 2025. Disponível em: https://penerbit.uthm.edu.my/ojs/index.php/emait/article/view/23476. Acesso em: 11 mar. 2026.