Salsabiila, Natasya, Nafarizal Nayan, Zulkifli Azman, Ahmad Shuhaimi Abu Bakar, Sharaifah Kamariah Wan Sabli, and Feri Adriyanto. 2025. “Mini Review of RF Magnetron Sputtering for Aluminum Nitride Thin Film Deposition: Scale-Up Challenges and Perspectives”. Emerging Advances in Integrated Technology 6 (2): 11-26. https://penerbit.uthm.edu.my/ojs/index.php/emait/article/view/23476.