Salsabiila, N. (2025) “Mini Review of RF Magnetron Sputtering for Aluminum Nitride Thin Film Deposition: Scale-Up Challenges and Perspectives”, Emerging Advances in Integrated Technology, 6(2), pp. 11–26. Available at: https://penerbit.uthm.edu.my/ojs/index.php/emait/article/view/23476 (Accessed: 11 March 2026).