Salsabiila N, Nayan N, Azman Z, Abu Bakar AS, Wan Sabli SK, Adriyanto F. Mini Review of RF Magnetron Sputtering for Aluminum Nitride Thin Film Deposition: Scale-Up Challenges and Perspectives. emait [Internet]. 2025 Dec. 30 [cited 2026 Mar. 11];6(2):11-26. Available from: https://penerbit.uthm.edu.my/ojs/index.php/emait/article/view/23476