TAHAN, M.; NAFARIZAL, N.; SAHDAN, M. Z.; BAKRI, A. S.; RASHIP, N. A.; AHMAD, M. K.; SOON, C. F.; AHMAD, M. Y. Growth of Aluminium Nitride Thin Film using Pulse-Modulated Rf Magnetron Sputtering Plasma. International Journal of Integrated Engineering, [S. l.], v. 12, n. 2, p. 132–138, 2020. Disponível em: https://penerbit.uthm.edu.my/ojs/index.php/ijie/article/view/5697. Acesso em: 8 apr. 2026.