AZMAN, Zulkifli; MOHAMMAD SHUHAILI, Falah Abid; ABU BAKAR, Ahmad Shuhaimi; MAT HUSIN, Mohd Rofei; KHAN, Jahanzeb; NAYAN, Nafarizal. Comparative Analysis of AlN Thin Film Uniformity on 2-Inch and 4-Inch Si Wafers Prepared by Magnetron Sputtering. International Journal of Integrated Engineering, [S. l.], v. 17, n. 6, p. 199–209, 2025. Disponível em: https://penerbit.uthm.edu.my/ojs/index.php/ijie/article/view/21944. Acesso em: 7 apr. 2026.