Azman, Z. (2025) “Comparative Analysis of AlN Thin Film Uniformity on 2-Inch and 4-Inch Si Wafers Prepared by Magnetron Sputtering”, International Journal of Integrated Engineering, 17(6), pp. 199–209. Available at: https://penerbit.uthm.edu.my/ojs/index.php/ijie/article/view/21944 (Accessed: 7 April 2026).