A. S. Bakri, “Fabrication of w-AlN Thin Films using Tilted Sputter Target and Unrotated Substrate Holder”, IJIE, vol. 12, no. 4, pp. 50–56, Apr. 2020, Accessed: Jul. 23, 2026. [Online]. Available: https://penerbit.uthm.edu.my/ojs/index.php/ijie/article/view/4350