Ramli N, Sidek O. Performance Comparison between Two Electrodes and Three Electrodes MEMS Capacitive Switch using Architect Coventorware. ijie [Internet]. 2014 Jan. 7 [cited 2024 May 2];5(3). Available from: https://penerbit.uthm.edu.my/ojs/index.php/ijie/article/view/822